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Silicon VLSI Technology: Fundamentals, Practice, and Modeling
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Author: James D. Plummer, Michael D. Deal, Peter B. Griffin
List Price: $116.00
Our Price: Click to see the latest and low price
ISBN: 0130850373
Publisher: Prentice Hall (14 July, 2000)
Edition: Hardcover
Sales Rank: 190,436
Average Customer Rating: 5 out of 5
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Customer ReviewsRating: 5 out of 5
Excellent combinations of basics & updated research
Before this book was published, Wolf & Tauber's book was the only good reference I had. Plummer's new book has a thorough review of basic principles, very well updated parts on current manufacturing equipments (Wolf's book also has extensive coverage in this respect). The best part in my opinion is oxidation & diffusion parts where the authors are one of the leaders in current research. The book not only focuses on the specific details, but also gives an integrated view of the whole CMOS fabrication process, which I enjoyed a lot. I strongly recommend this book for students who want to learn basics of IC fabrication and also professional engineers who needs a good and well updated reference.
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